1. Project Overview
Client: Founder Microelectronics (Pioneer in 6-inch SiC wafer manufacturing, National High-Tech Enterprise)
Location: Shenzhen, China
Capacity: 1,038m³ (236m² x 4.4m height)
Critical Requirements:
- ATEX/IECEx Zone 2 Compliance for semiconductor chemical storage
- Dual-temperature zones: 0-5°C (photoresist) & -20°C (etchants)
- Centralized cloud monitoring with fail-safe redundancy
- Energy efficiency <0.8 kW/m³
2. Explosion-Proof Engineering Solutions
(A) Refrigeration System
Zone | Equipment | Technical Specs |
---|---|---|
0-5°C Room | Bitzer ZXBG3-75Y Reciprocating Compressor | – Parallel system (2 duty + 1 standby) – COP 3.8 at +5°C ambient – IP66-rated explosion-proof casing |
-20°C Room | Bitzer ZXBD2-36Y Reciprocating Compressor | – 1 duty + 1 standby configuration – Low-temp R449A refrigerant – Gas leak sensors with auto-shutdown |
Supporting Components: Danfoss solenoid valves, Schrader pressure gauges, Alco oil separators
(B) Thermal Insulation & Structure
- Walls/Ceiling:
- 0-5°C: 100mm PUF panels (λ=0.022 W/m·K)
- -20°C: 150mm PUF panels (λ=0.020 W/m·K)
- Steel thickness: 0.5mm | Core density: 40±1kg/m³ | B1 fire rating
- Floor: 200mm XPS insulation (R-value 9.2) + epoxy conductive coating
(C) Hazardous Area Protection
- All electrical components: ATEX Category 3G certified
- Intrinsically safe wiring: IS barrier modules
- Gas detection: IR sensors for VOC/TICs
3. Intelligent Control System
- PLC: Siemens S7-200
- HMI: 10-inch Kunlun Tongtai touchscreen
- Electrical Components: Schneider Electric
- Features: Three-level user permissions, fault alarms, backup integrated display, mobile app monitoring, and remote query functions.
Key Features:
- 3-tier access control (operator/engineer/admin)
- Auto-switch to backup compressors within 8s of failure
- Real-time O₂ monitoring with emergency purge
4. Energy Efficiency & Cost Control
- Heat Recovery: Reclaim condenser heat for facility warm water
- EC Fans: 35% lower energy vs AC fans
- IoT Optimization: AI-based load forecasting reduces runtime 22%
5. Compliance & Validation
- Certified to: IEC 60079-15, NFPA 497
- URS Documentation: FAT/SAT protocols, IQ/OQ validation packs
- Materials: Chemically inert SS316L fittings
6. Client Profile: Founder Microelectronics
- Core Tech: SiC power devices, GaN-on-Si wafers
- Global Clients: Infineon, STMicroelectronics, Mitsubishi Electric
- Awards: National May 1st Labor Award, Top 10 Chinese Semiconductor Enterprises
Construction & Completion Photos

Actual shot of Shenzhen Founder Microelectronics Factory

Workers are unloading cold storage panels

Cutting cold storage panels

Install cold storage wall panels

Install cold storage panel

Install cold storage door