Shenzhen Founder Microelectronics 1,000m³ ATEX IECEx Zone2 Explosion-Proof Cold Storage EPC Case

Project Overview

This full turnkey dual-temperature explosion-proof cold storage was customized for Shenzhen Founder Microelectronics, a national high-tech enterprise engaged in SiC & GaN wafer R&D and manufacturing. The warehouse stores flammable photoresist, etching solution and electronic solvent, which belong to Zone 2 explosive hazardous area, requiring full ATEX/IECEx Category 3G explosion-proof compliance, ultra-stable constant temperature and redundant safety interlock system.

Core Basic Project Information

• Client: Shenzhen Founder Microelectronics (6-inch SiC wafer mass production enterprise, supplying Infineon, STMicroelectronics)
• Location: Shenzhen, South China (subtropical high temperature & high humidity annual peak ambient 38℃)
• Total effective volume: 1,038 m³ | Floor area: 236 ㎡ | Clear height: 4.4 m
• Dual independent isolation zones: 0–5℃ photoresist storage / -20℃ low-temperature etchant storage
• Mandatory compliance standard: IECEx Zone2, ATEX 2014/34/EU, GB 50058-2014, NFPA 497
• Core design indicators: Unit energy consumption ≤0.8 kW/m³, temperature fluctuation ≤±0.3℃, full gas leakage automatic shutdown interlock

Client Pre-Construction Core Pain Points

1. Original ordinary civil cold room without explosion-proof certification, VOC solvent volatilization has hidden fire risk, failed annual safety supervision audit;
2. Common refrigeration unit temperature fluctuation reaches ±1.2℃, photoresist photosensitive performance shifts, wafer production yield drops by 12%;
3. No standby compressor & cloud monitoring, power failure or unit breakdown leads to full batch chemical scrap loss;
4. Lack standardized validation documents, unable to pass multinational customer factory audit (Infineon, Mitsubishi Electric on-site inspection).

1 Dual Zone Explosion-Proof Refrigeration System Matching

Each temperature zone adopts one-main-one-standby redundant explosion-proof reciprocating unit, matched low-temperature environmental refrigerant R449A, all motors, solenoid valves, pressure gauges reach IP66 ATEX explosion-proof grade.

Functional Zone	Storage Goods	Refrigeration Configuration Core Parameters
0–5℃ Photoresist Zone	G-line / KrF photoresist, developer	2 sets duty + 1 spare Bitzer ZXBG3-75Y explosion-proof reciprocating compressors, COP=3.8 under 38℃ ambient; matched Danfoss explosion-proof solenoid valve, Alco oil separator
-20℃ Etchant Zone	Low-temperature concentrated etching solvent	1 set duty + 1 spare Bitzer ZXBD2-36Y low-temp explosion-proof unit, built-in IR VOC gas sensor with emergency shutdown interlock

System Safety Design Highlight: Once the IR detector detects solvent VOC concentration exceeding threshold, the refrigeration main unit automatically cuts off power, and fresh air purge fan starts linkage operation to eliminate explosion risk.

2 Explosion-Proof Insulation & Anti-Static Floor Structure

Adopt flame-retardant low thermal conductivity PUF panels, separate thickness design according to temperature zone, fully solve southern high-temperature heat penetration and static accumulation hidden danger:

Wall & Ceiling Panel Standard

1. 0–5℃ room: 100mm B1 flame retardant PUF, thermal conductivity λ=0.022 W/m·K, 0.5mm anti-static color steel
2. -20℃ deep cold zone: 150mm ultra-thick PUF, λ=0.020 W/m·K, block external high temperature heat load
   Core process: All wall-column, floor slab joints filled with closed-cell explosion-proof sealing glue to eliminate cold bridge and static leakage points.

Explosion-Proof Ground Special Treatment

200mm XPS anti-freeze insulation base + double-layer conductive epoxy anti-static coating, surface resistance controlled within safe range; slope drainage design, avoid solvent liquid accumulation on the ground to form explosive mixed gas.

3 Full Intrinsically Safe Electrical & Intelligent PLC Control Platform

The whole warehouse adopts ATEX Category 3G intrinsically safe electrical components, equipped three-level authority management and full-cycle tamper-proof data traceability system, complying with semiconductor factory audit requirements:

1. Core Hardware

• Main controller: Siemens S7-200 industrial PLC
• Touch HMI: 10-inch Kunlun Tongtai explosion-proof touch screen
• Electrical supporting: Schneider full explosion-proof distribution cabinet, IS intrinsic safety barrier modules for all signal lines

2. Safety & Monitoring Functions

• 3-tier access control: Operator / Equipment Engineer / Admin authority classification, operation records permanently stored
• Automatic standby switching: Main unit fault triggers backup compressor startup within 8 seconds, zero temperature out-of-range gap
• Real-time O₂ & VOC dual gas monitoring, automatic emergency air purge linkage
• Cloud mobile remote APP real-time viewing, multi-level SMS + local sound-light dual alarm
• 5-year non-editable temperature & gas storage data, meet multinational customer audit traceability demand

4 Energy-Saving Customized Design For Shenzhen High-Temp Climate

Aiming at Shenzhen summer 38℃ extreme ambient temperature, four exclusive energy-saving optimization modules reduce long-term power consumption:
1. Condenser waste heat recovery system: Recycle compressor heat for factory domestic hot water, recover 28% waste energy;
2. EC energy-saving explosion-proof fans: 35% lower power consumption than traditional AC fans, stable low air speed avoid solvent volatilization aggravation;
3. AI load prediction scheduling: PLC automatically adjust unit operating frequency according daytime temperature curve, annual running time reduced by 22%;
4. Full double-layer vapor barrier on roof, cut heat infiltration to lower average unit load.

5 Complete Regulatory Compliance & Validation Deliverables

This project fully meets domestic safety supervision and international semiconductor customer audit standards, delivering complete validation document package together with construction completion:
1. International Certifications: IECEx test report, ATEX CE declaration, NFPA 497 conformity document
2. Full Four-Stage Qualification File: URS user demand specification → D design qualification → FAT factory acceptance test → SAT site acceptance test → IQ installation qualification → OQ operation qualification full protocol & signed test records
3. Supporting Material Certificates: B1 flame retardant panel test report, explosion-proof electrical component CCC certificate, stainless SS316 pipeline material COA
4. On-Site Test Data: 72h full-load temperature fluctuation test, gas concentration interlock simulation test, anti-static ground resistance detection report

6 Post-Operation Measurable Core Benefits

The warehouse has been fully put into use for 18 months, with quantifiable safety, production and energy-saving gains:
1. Eliminate VOC explosion hidden danger, passed all municipal safety supervision & Infineon on-site customer audit without rectification;
2. Temperature controlled stably within ±0.3℃, photoresist scrap loss reduced from original 12% down to below 2.5%, wafer output value increased significantly;
3. Full set energy-saving design cut annual refrigeration electricity cost by 22% vs conventional explosion-proof cold room;
4. Dual standby unit + cloud monitoring completely avoid batch chemical scrap loss caused by single equipment failure.

7 Common Semiconductor Explosion-Proof Cold Storage Construction Pitfalls

1. Use ordinary non-explosion fan & lighting in Zone2 area → fail safety inspection, fire risk
2. Omit anti-static epoxy floor → solvent static spark explosion hazard
3. No standby refrigeration unit → long temperature deviation leads high-value photoresist full scrap
4. Simplify VOC gas interlock purge system → cannot pass multinational factory audit
5. Deliver incomplete IQ/OQ validation documents → customer order suspension risk

8 FAQ For Wafer & Chemical Enterprise Infrastructure Managers

Q1 What’s the mandatory temperature fluctuation standard for photoresist explosion-proof cold storage?

A According to semiconductor electronic chemical storage norms, photoresist storage environment fluctuation must be controlled ≤±0.3℃; over ±0.8℃ will cause irreversible shift of photosensitive properties, affecting chip lithography yield.

Q2 What difference between Zone1 and Zone2 explosion-proof cold storage configuration?

A Zone2 only needs Category3G intrinsically safe electrical; Zone1 must adopt higher ExdⅡCT6 full isolation explosion-proof structure with independent pressure relief wall, higher overall construction cost.

Q3 What full documents need to be handed over after explosion-proof cold storage completion?

A IECEx/ATEX certification, URS/DQ/FAT/SAT/IQ/OQ full validation protocols, explosion-proof electrical CCC certificates, ground anti-static test records, gas interlock simulation test reports.

Q4 Why -20℃ etchant zone needs thicker PUF panels than photoresist room?

A Low-temperature zone has larger temperature difference with outdoor 38℃ summer environment, 150mm ultra-thick insulation effectively block heat penetration, avoid unit long-term overload operation and high power consumption.

Custom Semiconductor Explosion-Proof Cold Storage Inquiry

If you need ATEX/IECEx Zone2 dual-temperature explosion-proof cold storage design for SiC/GaN wafer factories, photoresist & etching chemical enterprises in Pearl River Delta and Yangtze River Delta, provide warehouse volume and stored chemical categories to get free layout drawing and full compliance validation scheme quotation.

Construction & Completion Photos